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Main -> Pump systems -> Vacuum technology -> Diaphragm pumps
Diaphragm Pumps, ILMVAC®

For dry, oil-free applications in the rough and medium-high vacuum range ILMVAC diaphragm pumps are used world-wide in production, research and science as well as in industry, laboratory and education. As an economically and ecologically superior alternative to water operated vacuum pumps the ILMVAC diaphragm pump range always offers a versatile, practical solution for many diverse applications.

  • Vacuum distillation and filtration
  • Vacuum concentration
  • Vacuum drying
  • Manipulating and handing systems
  • Gel drying etc.

ILMVAC diaphragm pumps offer

  • different material for chemical (MPC) or physical (MP) processes
  • different flow rates from 300 l/h to 16 m³/h
  • final pressures from 75 to < 1 mbar
  • pressure control using VCB521

ILMVAC diaphragm pumps are available in complete pump systems - LVS laboratory vacuum systems - with components and materials selected for optimal practical employment in laboratory and industry.
Also used as regeneration pumps in combination pumping systems (Chemvac), they fulfill their tasks due to outstanding chemical resistance and stable vacuum parameters.
All ILMVAC diaphragm pumps are compactly and functionally designed. Maintenance and service work is fast and easy. ILMVAC diaphragm pumps guarantee outstanding operation and possess a long life span. They are extremely quiet in operation and work without oil.
Diaphragm pumps with ATEX approval are available on request.

Single-stage diaphragm pumps, final vacuum < 75 mbar
TypeSuction rate
m3/h		W × D × H
mm		Weight
kg		Order No.
MP 060 E 0.6115×165×145 2.310 92 41112
MP 105 E 0.9235×140×277 6.2510 92 41142
MP 301 E 2.3260×162×252 8.910 92 41171
MP 601 E 3.8230×265×16911.256 92 40292
MP 1201 E 8.3230×380×16918.356 92 40392
MP 2401 E15.5540×300×24032.856 92 41532
MPR 060 E 0.6115×165×145 2.310 92 41212
MPC 105 E 0.9235×140×277 6.310 92 41242
MPC 301 E 2.3260×162×252 8.910 92 41271
(1)MPC 601 E 3.8230×265×16911.256 92 40492
MPC 1201 E 8.3230×380×16918.356 92 40532
MPC 2401 E15.5540×300×24032.856 92 41792


Two-stage diaphragm pumps, final vacuum < 8 mbar
TypeSuction rate
m3/h		W × D × H
mm		Weight
kg		Order No.
MP 055 Z 0.5235×140×277 6.2510 92 41143
MP 101 Z 1.0195×235×145 6.556 92 40170
MP 301 Z 2.3230×265×16911.256 92 40282
MP 901 Z 6.8230×380×16918.356 92 40322
MP 1801 Z12.0540×300×24032.856 92 41542
MPC 055 Z 0.5235×140×277 6.2510 92 41243
(2)MPC 101 Z 1.0195×235×145 6.556 92 40171
MPC 301 Z 2.3230×265×16911.256 92 40482
MPC 901 Z 6.8230×380×16918.356 92 40522
MPC 1801 Z12.0540×300×24032.856 92 41552


Three-stage diaphragm pumps, final vacuum < 2 mbar
TypeSuction rate
m3/h		W × D × H
mm		Weight
kg		Order No.
MP 201 T2.0200×260×15010.356 92 40176
MP 601 T4.5230×380×16918.356 92 40312
MP 1201 T8.3540×300×24032.856 92 41522
MPC 105 T1.2235×140×327 7.510 92 41244
MPC 201 T2.0200×260×15010.356 92 40177
(3)MPC 601 T4.5230×380×16918.356 92 40512
MPC 1201 T8.3540×300×24032.856 92 41782


Four-stage diaphragm pumps, final vacuum < 1 mbar
TypeSuction rate
m3/h		W × D × H
mm		Weight
kg		Order No.
MP 101 V1.0200×260×15010.356 92 40180
MP 301 V2.3230×380×16918.356 92 40722


Diaphragm pumps ecoflex

The new generation of intelligent vacuum engineering.
Ecoflex diaphragm pumps are equipped with the vacuum Controllers VCB and are able to automatically adjust their rotational speed. Thus regulation of flow rate to match demand is achieved and the accuracy of the vacuum level is improves. The vacuum processes run more effectively and reproducibly. A reduction in operating cost of up to 80% is possible.

  • low noise level
  • smaller wear, longer maintenance level, longer life span
  • simple, menu-led programming of the Controllers VCB, directly or over PC
  • storage of all program and measuring data

Scope of delivery:
Diaphragm pump with special motor and frequency converter; Lead 1.5 m; Power supply plug and switch; hose nozzles for 8 mm hose inside diameters (with MPC 1201 T ecoflex with anges DN 16 KF) and controllers VCB.

For technical data of controller VCB 521 see here

TypeSuction rate
m3/h		Ultimate vac.
mbar		W × D × H
mm		Wght
kg		Order No.
MPC 301 Z ef2.68260×310×19015.556 92 42112
MPC 601 T ef4.92260×420×19022.656 92 42132
(4)MPC 1201 T ef8.32540×300×2403456 92 42152



MPC: chemical-resistant applications